JPH0246680B2 - - Google Patents

Info

Publication number
JPH0246680B2
JPH0246680B2 JP56067725A JP6772581A JPH0246680B2 JP H0246680 B2 JPH0246680 B2 JP H0246680B2 JP 56067725 A JP56067725 A JP 56067725A JP 6772581 A JP6772581 A JP 6772581A JP H0246680 B2 JPH0246680 B2 JP H0246680B2
Authority
JP
Japan
Prior art keywords
substrate
casing
cathode
conductive
electroplating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56067725A
Other languages
English (en)
Japanese (ja)
Other versions
JPS572899A (en
Inventor
Efu Nesutaa Jeimuzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of JPS572899A publication Critical patent/JPS572899A/ja
Publication of JPH0246680B2 publication Critical patent/JPH0246680B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP6772581A 1980-05-07 1981-05-07 Method and device for electroplating electroconductive substrate Granted JPS572899A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/147,662 US4302316A (en) 1980-05-07 1980-05-07 Non-contacting technique for electroplating X-ray lithography

Publications (2)

Publication Number Publication Date
JPS572899A JPS572899A (en) 1982-01-08
JPH0246680B2 true JPH0246680B2 (en]) 1990-10-16

Family

ID=22522406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6772581A Granted JPS572899A (en) 1980-05-07 1981-05-07 Method and device for electroplating electroconductive substrate

Country Status (3)

Country Link
US (1) US4302316A (en])
JP (1) JPS572899A (en])
DE (1) DE3114181A1 (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4454009A (en) * 1983-05-17 1984-06-12 S.G. Owen Limited Method of, and a machine for, electroplating
US4696878A (en) * 1985-08-02 1987-09-29 Micronix Corporation Additive process for manufacturing a mask for use in X-ray photolithography and the resulting mask
JPH087642Y2 (ja) * 1990-11-16 1996-03-04 ヤマハ株式会社 リードの半田メッキ装置
US5437724A (en) * 1993-10-15 1995-08-01 United Technologies Corporation Mask and grit container
US6228231B1 (en) 1997-05-29 2001-05-08 International Business Machines Corporation Electroplating workpiece fixture having liquid gap spacer
US5976331A (en) * 1998-04-30 1999-11-02 Lucent Technologies Inc. Electrodeposition apparatus for coating wafers
US6071388A (en) * 1998-05-29 2000-06-06 International Business Machines Corporation Electroplating workpiece fixture having liquid gap spacer
US8551313B2 (en) * 2007-11-15 2013-10-08 International Business Machines Corporation Method and apparatus for electroplating on soi and bulk semiconductor wafers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3414502A (en) * 1965-01-18 1968-12-03 Columbia Broadcasting Syst Inc Electroplating apparatus for use with a phonograph record matrix
GB1350070A (en) * 1970-09-23 1974-04-18 Int Computers Ltd Relectrolytic deposition of metals
JPS4849630A (en]) * 1971-10-26 1973-07-13
US3915832A (en) * 1972-07-17 1975-10-28 Western Electric Co Electroplating apparatus for forming a nonuniform coating on workpieces
NL7316245A (nl) * 1973-10-04 1975-04-08 Galentan Ag Werkwijze voor het selectief aanbrengen van een llaag op de door een isolerend lichaam ge- e metaaldelen van electrische bouwelementen.
US4042480A (en) * 1973-10-04 1977-08-16 Noz Francis X Apparatus for selectively applying a metal coating to the metallic parts of elements which pass through an insulator
US4043894A (en) * 1976-05-20 1977-08-23 Burroughs Corporation Electrochemical anodization fixture for semiconductor wafers
US4126521A (en) * 1977-10-19 1978-11-21 Computer Peripherals, Inc. Method of coating metal surfaces

Also Published As

Publication number Publication date
JPS572899A (en) 1982-01-08
US4302316A (en) 1981-11-24
DE3114181C2 (en]) 1991-06-27
DE3114181A1 (de) 1982-01-28

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